Optical inspection system and method including accounting for variations of optical path length within a sample

    公开(公告)号:AU2018204450A1

    公开(公告)日:2018-07-12

    申请号:AU2018204450

    申请日:2018-06-20

    Applicant: APPLE INC

    Abstract: An illuminator/collector assembly (104) can deliver incident light (106) to a sample (102) and collect return light (112) returning from the sample (102). A sensor (114) can measure ray intensities as a function of ray position and ray angle for the collected return light (112). A ray selector can select a first subset of rays from the collected return light (112) at the sensor (114) that meet a first selection criterion. In some examples, the ray selector can aggregate ray intensities into bins, each bin corresponding to rays in the collected return light (112) that traverse within the sample (102) an estimated optical path length within a respective range of optical path lengths. A characterizer can determine a physical property of the sample (102), such as absorptivity, based on the ray intensities, ray positions, and ray angles for the first subset of rays. Accounting for variations in optical path length traversed within the sample can improve accuracy.

    Optical system for reference switching

    公开(公告)号:AU2017253712B2

    公开(公告)日:2019-11-07

    申请号:AU2017253712

    申请日:2017-04-13

    Applicant: APPLE INC

    Abstract: Systems and methods for determining one or more properties of a sample are disclosed. The systems and methods disclosed can be capable of measuring along multiple locations and can reimage and resolve multiple optical paths within the sample. The system can be configured with one-layer or two-layers of optics suitable for a compact system. The optics can be simplified to reduce the number and complexity of the coated optical surfaces, etalon effects, manufacturing tolerance stack-up problems, and interference-based spectroscopic errors. The size, number, and placement of the optics can enable multiple simultaneous or non- simultaneous measurements at various locations across and within the sample. Moreover, the systems can be configured with an optical spacer window located between the sample and the optics, and methods to account for changes in optical paths due to inclusion of the optical spacer window are disclosed.

    Optical system for reference switching

    公开(公告)号:AU2019226228A1

    公开(公告)日:2019-09-26

    申请号:AU2019226228

    申请日:2019-09-06

    Applicant: APPLE INC

    Abstract: Systems and methods for determining one or more properties of a sample are disclosed. The systems and methods disclosed can be capable of measuring along multiple locations and can reimage and resolve multiple optical paths within the sample. The system can be configured with one-layer or two-layers of optics suitable for a compact system. The optics can be simplified to reduce the number and complexity of the coated optical surfaces, etalon effects, manufacturing tolerance stack-up problems, and interference-based spectroscopic errors. The size, number, and placement of the optics can enable multiple simultaneous or non-simultaneous measurements at various locations across and within the sample. Moreover, the systems can be configured with an optical spacer window located between the sample and the optics, and methods to account for changes in optical paths due to inclusion of the optical spacer window are disclosed.

    Optical system for reference switching

    公开(公告)号:AU2019226228B2

    公开(公告)日:2021-08-05

    申请号:AU2019226228

    申请日:2019-09-06

    Applicant: APPLE INC

    Abstract: Systems and methods for determining one or more properties of a sample are disclosed. The systems and methods disclosed can be capable of measuring along multiple locations and can reimage and resolve multiple optical paths within the sample. The system can be configured with one-layer or two-layers of optics suitable for a compact system. The optics can be simplified to reduce the number and complexity of the coated optical surfaces, etalon effects, manufacturing tolerance stack-up problems, and interference-based spectroscopic errors. The size, number, and placement of the optics can enable multiple simultaneous or non-simultaneous measurements at various locations across and within the sample. Moreover, the systems can be configured with an optical spacer window located between the sample and the optics, and methods to account for changes in optical paths due to inclusion of the optical spacer window are disclosed.

    Optical system for reference switching

    公开(公告)号:AU2017253712B8

    公开(公告)日:2019-11-21

    申请号:AU2017253712

    申请日:2017-04-13

    Applicant: APPLE INC

    Abstract: Systems and methods for determining one or more properties of a sample are disclosed. The systems and methods disclosed can be capable of measuring along multiple locations and can reimage and resolve multiple optical paths within the sample. The system can be configured with one-layer or two-layers of optics suitable for a compact system. The optics can be simplified to reduce the number and complexity of the coated optical surfaces, etalon effects, manufacturing tolerance stack-up problems, and interference-based spectroscopic errors. The size, number, and placement of the optics can enable multiple simultaneous or non- simultaneous measurements at various locations across and within the sample. Moreover, the systems can be configured with an optical spacer window located between the sample and the optics, and methods to account for changes in optical paths due to inclusion of the optical spacer window are disclosed.

    Optical system for reference switching

    公开(公告)号:AU2017253712A1

    公开(公告)日:2019-06-27

    申请号:AU2017253712

    申请日:2017-04-13

    Applicant: APPLE INC

    Abstract: Systems and methods for determining one or more properties of a sample are disclosed. The systems and methods disclosed can be capable of measuring along multiple locations and can reimage and resolve multiple optical paths within the sample. The system can be configured with one-layer or two-layers of optics suitable for a compact system. The optics can be simplified to reduce the number and complexity of the coated optical surfaces, etalon effects, manufacturing tolerance stack-up problems, and interference-based spectroscopic errors. The size, number, and placement of the optics can enable multiple simultaneous or non- simultaneous measurements at various locations across and within the sample. Moreover, the systems can be configured with an optical spacer window located between the sample and the optics, and methods to account for changes in optical paths due to inclusion of the optical spacer window are disclosed.

    Optical inspection system and method including accounting for variations of optical path length within a sample

    公开(公告)号:AU2018204450B2

    公开(公告)日:2019-07-18

    申请号:AU2018204450

    申请日:2018-06-20

    Applicant: APPLE INC

    Abstract: An illuminator/collector assembly (104) can deliver incident light (106) to a sample (102) and collect return light (112) returning from the sample (102). A sensor (114) can measure ray intensities as a function of ray position and ray angle for the collected return light (112). A ray selector can select a first subset of rays from the collected return light (112) at the sensor (114) that meet a first selection criterion. In some examples, the ray selector can aggregate ray intensities into bins, each bin corresponding to rays in the collected return light (112) that traverse within the sample (102) an estimated optical path length within a respective range of optical path lengths. A characterizer can determine a physical property of the sample (102), such as absorptivity, based on the ray intensities, ray positions, and ray angles for the first subset of rays. Accounting for variations in optical path length traversed within the sample can improve accuracy.

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