公开(公告)号：AU2003239180A1

公开(公告)日：2003-11-10

申请号：AU2003239180

申请日：2003-04-25

Applicant: APPLIED SCIENCE AND TECHNOLOGY INC

Inventor： GOTTSCHALK CHRISTINE ,  FITTKAU JENS ,  SEIWERT JOHANNES

IPC: B01F1/00 ,  C01B13/00 ,  C01B13/10 ,  C02F1/78 ,  G05D21/00 ,  H01L21/02 ,  H01L21/304 ,  G05D21/02

Abstract: A method for mixing fluids for process tools comprises: receiving a first fluid having a first flow and a first concentration to be supplied to a first process tool; receiving a second fluid having a second flow and second concentration; and mixing the first and the second fluid to produce a third fluid having a third flow and third concentration to be supplied to a second process tool.