公开(公告)号：WO2015073873A1

公开(公告)日：2015-05-21

申请号：PCT/US2014/065776

申请日：2014-11-14

Applicant: ARIZONA BOARD OF REGENTS ON BEHALF OF ARIZONA STATE UNIVERSITY

Inventor： YU, Hongbin ,  JIANG, Hanqing ,  LIANG, Hanshuang ,  MA, Teng

IPC: G01B11/16

CPC classification number: G01L1/241 ,  H01L22/12

Abstract: The present invention relates to methods for measuring and/or mapping in-plane strain of a surface of a substrate. According to the present invention, a grating is formed on at least a portion of the surface of the substrate. A laser is then used focused onto the grating to determine the strain on the surface by determining the variation of the grating wavelength due to the strain on the surface. The strain information is essentially carried by the grating, in terms of grating wavelength, because it varies according to the volume change of the underlying substrates. By scanning the surface grating with the small laser size, a high resolution strain map of the surface can be produced. The induced strain is related to the grating wavelength variation, which leads to the diffraction angle variation that is captured by the strain sensing measurements.

Abstract translation: 本发明涉及用于测量和/或映射衬底表面的面内应变的方法。 根据本发明，在基板表面的至少一部分上形成光栅。 然后将激光器聚焦到光栅上，以通过确定由于表面上的应变引起的光栅波长的变化来确定表面上的应变。 根据光栅波长，应变信息基本上由光栅承载，因为它根据下面的基底的体积变化而变化。 通过以小的激光尺寸扫描表面光栅，可以产生表面的高分辨率应变图。 感应应变与光栅波长变化有关，这导致应变感测测量所捕获的衍射角变化。