-
公开(公告)号：US20220291598A1
公开(公告)日：2022-09-15
申请号：US17770575
申请日：2020-09-28
Applicant: ASML Holding N.V.
Inventor： Krishanu SHOME , Igor Petronella AARTS , Junwon LEE
Abstract: An apparatus for and method of sensing alignment marks in which a self-referencing interferometer based sensor outputs standing images of the alignment marks and camera device is used to capture the images as output by the sensor and a detector is used to obtain phase information about the alignment marks from the images as output by the sensor.
Search Results
1
records
(took 0.021 seconds)
筛选
AND
AND
过滤
NOT
NOT
Scan to Join
