公开(公告)号：WO2022008164A1

公开(公告)日：2022-01-13

申请号：PCT/EP2021/065798

申请日：2021-06-11

Applicant: ASML NETHERLANDS B.V.

Inventor： ABDOLVAND, Amir ,  CRAUS, Cristian, Bogdan ,  EZERSKAIA, Anna ,  DOMALAPALLY, Phani Kumar

IPC: G02F1/355 ,  G02F1/383

Abstract: Disclosed is an optical component for a broadband light source device, the optical component being configured for generating a broadband output upon receiving pump radiation and comprising: a hollow-core photonic crystal fiber (HC-PCF); and a gas mixture filling said HC-PCF, wherein said gas mixture comprises a mixture of at least one first gas configured for the generation of the broadband radiation and at least one second gas comprising or consisting of Helium.

公开(公告)号：EP3936937A1

公开(公告)日：2022-01-12

申请号：EP21179014.2

申请日：2021-06-11

Applicant: ASML Netherlands B.V.

Inventor： ABDOLVAND, Amir ,  CRAUS, Cristian, Bogdan ,  EZERSKAIA, Anna ,  DOMALAPALLY, Phani Kumar

IPC: G02F1/355 ,  G02F1/383 ,  G02F1/35

Abstract: Disclosed is an optical component for a broadband light source device, the optical component being configured for generating a broadband output upon receiving pump radiation and comprising: a hollow-core photonic crystal fiber (HC-PCF); and a gas mixture filling said HC-PCF, wherein said gas mixture comprises a mixture of at least one first gas configured for the generation of the broadband radiation and at least one second gas comprising or consisting of Helium.

公开(公告)号：EP3936936A1

公开(公告)日：2022-01-12

申请号：EP20184730.8

申请日：2020-07-08

Applicant: ASML Netherlands B.V.

Inventor： ABDOLVAND, Amir ,  CRAUS, Cristian, Bogdan ,  EZERSKAIA, Anna

IPC: G02F1/355 ,  G02F1/383

Abstract: Disclosed is a broadband light source device, being configured for generating a broadband output upon receiving pump radiation, comprising: an optical component, comprising: a hollow-core photonic crystal fiber (HC-PCF) ; and a gas mixture filling said HC-PCF, wherein said gas mixture comprises a mixture of a first gas configured for the generation of broadband radiation and at least one second gas, different from the first gas, configured to improve thermal conductivity of said gas mixture and/or provide acoustic damping of shock waves initiated during said generation of broadband radiation, further wherein said second gas comprises or consists of: i) an atomic gas having a smaller atomic weight than said first gas; and/or ii) a molecular gas providing no more than 10 parts-per-million (ppm) Hydrogen in mole fraction to the gas mixture.