公开(公告)号：US20150370174A1

公开(公告)日：2015-12-24

申请号：US14764522

申请日：2014-03-06

Applicant: ASML NETHERLANDS B.V.

Inventor： Johannes Jacobus Matheus BASELMANS ,  Franciscus Godefridus BIJNEN ,  Daniëlle Elisabeth Maria PALMEN

IPC: G03F7/20

CPC classification number: G03F9/708 ,  G03F1/42 ,  G03F1/44 ,  G03F7/70058

Abstract: A patterning device, for use in forming a marker on a substrate by optical projection, the patterning device including a marker pattern having a density profile that is periodic with a fundamental spatial frequency corresponding to a desired periodicity of the marker to be formed. The density profile is modulated (such as sinusoidally) so as to suppress one or more harmonics of the fundamental frequency, relative to a simple binary profile having the fundamental frequency.

Abstract translation: 一种用于通过光学投影在基板上形成标记的图案形成装置，所述图案形成装置包括具有对应于待形成的标记物的所需周期性的基本空间频率周期性的密度分布的标记图案。 相对于具有基本频率的简单二进制分布，密度分布被调制（例如正弦曲线）以便抑制基频的一个或多个谐波。