公开(公告)号：US20160054665A1

公开(公告)日：2016-02-25

申请号：US14931560

申请日：2015-11-03

Applicant: ASML NETHERLANDS B.V.

Inventor： Christiaan Alexander HOOGENDAM ,  Gerrit Johannes NIJMEIJER ,  Minne CUPERUS ,  Petrus Anton Willem Cornelia Maria VAN EIJCK

IPC: G03F7/20 ,  G01B11/27 ,  G01B11/14

CPC classification number: G03F7/70341 ,  G01B11/14 ,  G01B11/26 ,  G01B11/272 ,  G03F7/707 ,  G03F7/70716 ,  G03F7/70775 ,  G03F9/7011

Abstract: A method for determining an offset between a center of a substrate and a center of a depression in a chuck includes providing a test substrate to the depression, the test substrate having a dimension smaller than a dimension of the depression, measuring a position of an alignment mark of the test substrate while in the depression, and determining the offset between the center of the substrate and the center of the depression from the position of the alignment mark.