公开(公告)号：US20250060738A1

公开(公告)日：2025-02-20

申请号：US18721460

申请日：2022-12-14

Applicant: ASML NETHERLANDS B.V.

Inventor： Eleftherios KOULIERAKIS ,  Anjan Prasad GANTAPARA ,  Satej Subhash KHEDEKAR ,  Hamideh ROSTAMI

IPC: G05B23/02

Abstract: A method for training a diagnostic model for diagnosing a production system, wherein the production system includes a plurality of sub-systems. The diagnostic model includes, for each sub-system, a corresponding first learning model arranged to receive input data, and to generate compressed data for the production system in a corresponding compressed latent space. A second learning model is arranged to receive the compressed data generated by the first learning models, and generate further compressed data for the production system in a further compressed latent space. The method includes performing training of the first and second learning models based on training data derived from sensor data characterizing the sub-systems.