公开(公告)号：US20250029014A1

公开(公告)日：2025-01-23

申请号：US18712765

申请日：2022-11-21

Applicant: ASML NETHERLANDS B.V.

Inventor： Dimitriy DOUNAEV ,  Dimitra GKOROU ,  Zahra KAREVAN ,  Jefrey LIJFFIJT ,  Pieter VAN HERTUM ,  Joachim Kinley VAN SCHOUBROECK ,  Alexander YPMA

IPC: G06N20/20 ,  G03F7/00

Abstract: A fault in a subject production apparatus which is suspected of being a deviating machine, is identified based on whether it is possible to train a machine learning model to distinguish between first sensor data derived from the subject production apparatus, and second sensor data derived from one or more other production apparatuses which are assumed to be behaving normally. Thus, the discriminative ability of the machine learning model is used as an indicator to discriminate between a faulty machine and the population of healthy machines.