公开(公告)号：US20210271159A1

公开(公告)日：2021-09-02

申请号：US17256048

申请日：2019-06-03

Applicant: ASML NETHERLANDS B.V.

Inventor： Martin Dieter Nico PETERS ,  Marcellus Antonius DE FOLTER

IPC: G03F1/64 ,  G03F1/66 ,  B65G47/92

Abstract: An apparatus including: a first gripping member having a first magnetic element and moveable between a first position and a second position; a first biasing member configured to bias the first gripping member toward the first position; and a second magnetic element selectively operable in a first mode, in which the second magnetic element interacts with the first magnetic element to overcome the first biasing member and move the first gripping member to the second position, and a second mode, in which the second magnetic element does not overcome the first biasing member such that the first gripping member rests in the first position.