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1.发明授权公开(公告)号：US10191392B2
公开(公告)日：2019-01-29
申请号：US15324264
申请日：2015-07-10
Applicant: ASML Netherlands B.V.
Inventor： Johannes Adrianus Antonius Theodorus Dams , Dirk Hendrikus Marinus Engelen , Peter Michel Silvester Maria Heijmans , Simon Bernardus Cornelis Maria Martens , Hans Butler , Antonius Franciscus Johannes De Groot
Abstract: An actuator includes coil assemblies arranged in an array, wherein each coil assembly defines a core chamber having a core chamber height; and at least one magnetic member that extends partly along the core chamber height of the core chamber of a corresponding at least one coil assembly, wherein the at least one magnetic member is made of a magnetic material. A shape of the at least one magnetic member, a size of the at least one magnetic member, a position of the at least one magnetic member and/or the magnetic material of the at least one magnetic member may be selected so as to control one or more parameters of the actuator.
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公开(公告)号：US11262663B2
公开(公告)日：2022-03-01
申请号：US17050240
申请日：2019-03-21
Applicant: ASML Netherlands B.V.
Inventor： Peter Michel Silvester Maria Heijmans , Olof Martinus Josephus Fischer , Maarten Hartger Kimman , Edwin Van Horne , Antonie Hendrik Verweij
Abstract: The present invention provides a tubular linear actuator, comprising: a tubular coil assembly comprising multiple tubular coils arranged next to each other in longitudinal direction of the tubular linear actuator and concentric with respect to a longitudinal axis of the tubular linear actuator, and a magnet assembly comprising a series of permanent magnets with alternating polarization direction extending in the longitudinal direction, wherein the magnet assembly is at least partially arranged in the coil assembly and movably with respect to the coil assembly, wherein the tubular coils comprise edge windings.
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公开(公告)号：US10114300B2
公开(公告)日：2018-10-30
申请号：US14419640
申请日：2013-08-15
Applicant: ASML Netherlands B.V.
Inventor： Henrikus Herman Marie Cox , Mark Marcus Gerardus Heeren , Peter Michel Silvester Maria Heijmans , Jacob Jan Velten , Johannes Hubertus Antonius Van De Rijdt , Godfried Katharina Hubertus Franciscus Geelen , Abdelhamid Kechroud
IPC: G03F9/00 , G03F7/20 , H02K41/035 , H02K9/22 , H02K1/06
Abstract: An electromagnetic actuator includes a coil assembly including a coil; a magnet assembly including a first and a second magnet unit, each magnet unit including a magnetic yoke and a plurality of permanent magnets mounted to the magnetic yoke, the first and second magnet unit forming a magnetic circuit for receiving the coil assembly and, upon energizing the coil, generating a force in a first direction; and a holder for holding the magnet units, wherein a weight ratio of the magnet assembly over the coil assembly is smaller than the weight ratio of the magnet assembly over the coil assembly when the ratio of force over electrical power is maximized.
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公开(公告)号：US11112705B2
公开(公告)日：2021-09-07
申请号：US16756629
申请日：2018-09-05
Applicant: ASML Netherlands B.V.
Inventor： Joost Johan Bolder , Peter Michel Silvester Maria Heijmans , Jeroen Van Duivenbode , Ruud Hubertus Silvester Vrenken
IPC: G03F7/20 , H02P25/064 , H02P6/00 , H02K41/03 , H02P6/182
Abstract: The invention relates to a motor (LD) comprising: a stationary part (STP), comprising: a row of coil assemblies (UCA,LCA), the coil assemblies having multiple phases, a movable part (MP), comprising: a row of permanent magnets (UPM,LPM), wherein the row of coil assemblies has a first length and the row of permanent magnets has a second length, wherein the second length is smaller than the first length, wherein the coil assemblies are arranged to interact with permanent magnets aligned with the coil assemblies to generate a driving force, a comparator to compare a position measurement signal representative for an actual position of the movable part with a set-point signal representative for a desired position of the movable part to provide an error signal; a motion feedback controller configured to provide a control signal on the basis of the error signal; at least one current amplifier configured to provide an actuation signal to the coil assemblies on the basis of the control signal, wherein the motor comprises a feedforward device, wherein the feedforward device is configured to provide a current amplifier feedforward signal on the basis of the set-point signal, or a derivative thereof, wherein the current amplifier feedforward signal is provided to the at least one current amplifier to compensate for unbalanced back electromotive forces on one or more of the coil assemblies due to the one or more coil assemblies being only partly aligned with the permanent magnets.
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公开(公告)号：US09293951B2
公开(公告)日：2016-03-22
申请号：US13737848
申请日：2013-01-09
Applicant: ASML NETHERLANDS B.V.
Inventor： Fidelus Adrianus Boon , Hendrikus Pascal Gerardus Johannes Van Agtmaal , Abdelhamid Kechroud , Sven Antoin Johan Hol , Peter Michel Silvester Maria Heijmans
CPC classification number: H02K1/06 , G03F7/70758
Abstract: A lithographic apparatus includes an actuator for producing a force in a first direction between a first and a second part including a first magnet assembly and a second magnet assembly each attached opposite to each other to the first part of the apparatus, the first magnet assembly including a first main magnet system and a first outer subsidiary magnet system, and the second magnet assembly including a second main magnet system and a second outer subsidiary magnet system, the first and second main magnet system defining a space between them in a second direction perpendicular to the first direction. The actuator includes a coil attached to the second part. The distance between the first outer subsidiary magnet system and the second outer subsidiary magnet system in the second direction is substantially zero.
Abstract translation: 光刻设备包括用于在包括第一磁体组件和第二磁体组件的第一和第二部分之间沿第一方向产生力的致动器，每个第一磁体组件和第二磁体组件彼此相对地安装到装置的第一部分，第一磁体组件包括 第一主磁体系统和第一外部辅助磁体系统，第二磁体组件包括第二主磁体系统和第二外部辅助磁体系统，第一和第二主磁体系统在垂直于第二主磁体系统的第二方向上在它们之间限定空间 第一个方向。 致动器包括附接到第二部件的线圈。 第一外辅助磁体系统和第二外辅助磁体系统在第二方向上的距离基本为零。
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Patent Agency Ranking
6.发明申请公开(公告)号：US20150234297A1
公开(公告)日：2015-08-20
申请号：US14428287
申请日：2013-08-26
Applicant: ASML Netherlands B.V.
Inventor： Johannes Antonius Gerardus Akkermans , Bas Pieter Lemmen , Sjoerd Martijn Huiberts , Joeri Lof , Petrus Theodorus Rutgers , Sven Antoin Johan Hol , Harmeet Singh , Peter Michel Silvester Maria Heijmans
CPC classification number: G03F7/70725 , G03F7/22 , G03F7/70758 , H01F7/081 , H01F7/1646 , H02K11/20 , H02K41/025 , H02K41/03 , H02K41/033 , H02P6/16 , H02P25/034 , H02P25/06 , H02P25/08 , H02P25/092
Abstract: A reluctance actuator assembly comprising a reluctance actuator, a flux sensor to measure a magnetic flux in a gap of the reluctance actuator, and a flux amplifier to drive an actuator coil of the reluctance actuator based on a flux set point and the flux measured by the flux sensor. A method comprising providing to the flux amplifier a flux setpoint, the flux setpoint comprising a time constant component and a sinusoidally varying component at an excitation frequency, measuring a force generated by the reluctance actuator in response to the flux setpoint, and calibrating the reluctance actuator assembly from the measured force.
Abstract translation: 一种磁阻致动器组件，包括磁阻致动器，用于测量磁阻致动器的间隙中的磁通量的磁通传感器，以及基于磁通量设定点和磁通量测量的磁通量来驱动磁阻致动器的致动器线圈的磁通放大器 通量传感器 一种方法，包括向所述通量放大器提供磁通设定点，所述通量设定点包括在激励频率处的时间常数分量和正弦变化分量，以响应于所述通量设定点测量由所述磁阻致动器产生的力，以及校准所述磁阻致动器 从测量力组装。
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公开(公告)号：US11837931B2
公开(公告)日：2023-12-05
申请号：US17690203
申请日：2022-03-09
Applicant: ASML Netherlands B.V.
Inventor： Maarten Hartger Kimman , Dave Braaksma , Peter Michel Silvester Maria Heijmans , Christiaan Alexander Hoogendam
CPC classification number: H02K3/28 , G03F7/70758 , H02K41/031 , H02K7/09 , H02K29/03 , H02K2201/18 , H02K2213/03
Abstract: An electromagnetic motor is described, the electromagnetic motor comprising: a magnet assembly configured to generate a two-dimensional alternating magnetic field having a pitch Pm1 in a first direction and a pitch Pm2 in a second direction; a coil assembly configured to co-operate with the magnet assembly to generate a first force in the first direction and a second force in the second direction, wherein the coil assembly comprises a first coil set comprising a plurality of first coils for generating the first force and a second coil set comprising a plurality of second coils for generating the second force, wherein a ratio R1 of a coil pitch Pc1 in the first coil set in the first direction over Pm1 is different from a ratio R2 of a coil pitch Pc2 in the second coil set in the second direction over Pm2.
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公开(公告)号：US20220200385A1
公开(公告)日：2022-06-23
申请号：US17690203
申请日：2022-03-09
Applicant: ASML Netherlands B.V.
Inventor： Maarten Hartger Kimman , Dave Braaksma , Peter Michel Silvester Maria Heijmans , Christiaan Alexander Hoogendam
Abstract: An electromagnetic motor is described, the electromagnetic motor comprising: a magnet assembly configured to generate a two-dimensional alternating magnetic field having a pitch Pm1 in a first direction and a pitch Pm2 in a second direction; a coil assembly configured to co-operate with the magnet assembly to generate a first force in the first direction and a second force in the second direction, wherein the coil assembly comprises a first coil set comprising a plurality of first coils for generating the first force and a second coil set comprising a plurality of second coils for generating the second force, wherein a ratio R1 of a coil pitch Pc1 in the first coil set in the first direction over Pm1 is different from a ratio R2 of a coil pitch Pc2 in the second coil set in the second direction over Pm2.
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公开(公告)号：US11303175B2
公开(公告)日：2022-04-12
申请号：US16073258
申请日：2017-01-05
Applicant: ASML Netherlands B.V.
Inventor： Maarten Hartger Kimman , Dave Braaksma , Peter Michel Silvester Maria Heijmans , Christiaan Alexander Hoogendam
Abstract: An electromagnetic motor is described, the electromagnetic motor comprising:
a magnet assembly configured to generate a two-dimensional alternating magnetic field having a pitch Pm1 in a first direction and a pitch Pm2 in a second direction;
a coil assembly configured to co-operate with the magnet assembly to generate a first force in the first direction and a second force in the second direction, wherein the coil assembly comprises a first coil set comprising a plurality of first coils for generating the first force and a second coil set comprising a plurality of second coils for generating the second force, wherein a ratio R1 of a coil pitch Pc1 in the first coil set in the first direction over Pm1 is different from a ratio R2 of a coil pitch Pc2 in the second coil set in the second direction over Pm2.-
公开(公告)号：US10372045B2
公开(公告)日：2019-08-06
申请号：US14428287
申请日：2013-08-26
Applicant: ASML Netherlands B.V.
Inventor： Johannes Antonius Gerardus Akkermans , Bas Pieter Lemmen , Sjoerd Martijn Huiberts , Joeri Lof , Petrus Theodorus Rutgers , Sven Antoin Johan Hol , Harmeet Singh , Peter Michel Silvester Maria Heijmans
IPC: G03F7/20 , H01F7/08 , H01F7/16 , H02P25/08 , H02P6/16 , H02P25/06 , H02K41/025 , H02P25/034 , G03F7/22 , H02K11/00 , H02K41/03
Abstract: A reluctance actuator assembly comprising a reluctance actuator, a flux sensor to measure a magnetic flux in a gap of the reluctance actuator, and a flux amplifier to drive an actuator coil of the reluctance actuator based on a flux set point and the flux measured by the flux sensor. A method comprising providing to the flux amplifier a flux setpoint, the flux setpoint comprising a time constant component and a sinusoidally varying component at an excitation frequency, measuring a force generated by the reluctance actuator in response to the flux setpoint, and calibrating the reluctance actuator assembly from the measured force.
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