公开(公告)号：US20220350265A1

公开(公告)日：2022-11-03

申请号：US17627720

申请日：2020-06-18

Applicant: ASML NETHERLANDS B.V.

Inventor： Günes NAKIBOGLU ,  Nicholas Peter WATERSON ,  Remco VAN DE MEERENDONK ,  Steve Gregory BRUST ,  Dirk Martinus Gerardus Petrus Wilhelmus JAKOBS ,  Shravan KOTTAPALLI

IPC: G03F7/20

Abstract: A passive flow induced vibration reduction system for use in a temperature conditioning system that controls the temperature of at least one component within a lithographic apparatus. This FIV reduction system includes: a conduit that provides a flow path for a liquid through the system; a liquid filled cavity in fluid connection with the conduit, wherein the fluid connection is provided via one or more openings in the wall of the conduit; a membrane configured such that it separates the liquid in the liquid filled cavity from a gas at a substantially ambient pressure and the membrane is configured such that compliance of the membrane reduces at least low frequency flow induced vibrations in the liquid flowing through the conduit; and an end-stop located on the gas side of the membrane, wherein the end-stop is configured to limit an extent of deflection of the membrane.

公开(公告)号：US20220121124A1

公开(公告)日：2022-04-21

申请号：US17298202

申请日：2019-11-19

Applicant: ASML NETHERLANDS B.V.

Inventor： Bas Bastiaan Cornelis Gijsbertus VAN ELTEN ,  Philippe Jacqueline Johannes Hubertus Anthonius HABETS ,  Remco VAN DE MEERENDONK

IPC: G03F7/20 ,  F15D1/02 ,  F16L55/027

Abstract: A flow restriction, a flow restriction assembly and methods for manufacturing the flow restriction and the flow restriction assembly. The flow restriction is for use in a pipe so as to restrict the flow of a fluid and includes a body extending along an axis and that has i) a central portion having an essentially constant cross section, ii) an upstream portion, wherein the cross-sectional area of the upstream portion monotonically increases in a downstream direction along the axis; and iii) a downstream portion, wherein the cross-sectional area of the downstream portion monotonically decreases in the downstream direction. The flow restriction also has a plurality of central portion projections for engaging the inner surface of the pipe, each of which projects from the surface of the central portion in a direction perpendicular to the surface of the central portion by a distance of less than 500 μm.

公开(公告)号：US20240176255A1

公开(公告)日：2024-05-30

申请号：US18284608

申请日：2022-03-22

Applicant: ASML NETHERLANDS B.V.

Inventor： Remco VAN DE MEERENDONK ,  Daniel Jozef, Maria DIRECKS ,  Günes NAKÍBOGLU ,  Nicholas Peter WATERSON ,  Joost André KLUGKIST ,  Sven PEKELDER ,  Antonius Johannus VAN DER NET ,  Johannes Henricus Wilhelmus JACOBS ,  Jaap OUDES ,  Gerardus Arnoldus Hendricus, Franciscus JANSSEN ,  Jeroen, Peterus Johannes VAN LIPZIG ,  Johannes, Franciscus Martinus VAN SANTVOORT

IPC: G03F7/00

CPC classification number: G03F7/70891

Abstract: A temperature conditioning system using conditioning liquid to condition a temperature of an object, the system including a conditioning conduit, a return conduit, a supply chamber, and a discharge chamber, wherein the temperature conditioning system is arranged to provide a static pressure difference between the supply chamber outlet and the discharge chamber inlet to create a flow through the conditioning conduit. A lithography apparatus and a method of temperature conditioning an object is also described.