公开(公告)号：US09715174B2

公开(公告)日：2017-07-25

申请号：US14443965

申请日：2013-10-30

Applicant: ASML Netherlands B.V.

Inventor： Johan Frederik Dijksman ,  Ramin Badie ,  Ronald Johannes Hultermans ,  Dzmitry Labetski

IPC: G03B27/54 ,  G03F7/20 ,  H05G2/00 ,  B05B17/06

CPC classification number: G03F7/70033 ,  B05B17/06 ,  H05G2/005 ,  H05G2/006 ,  H05G2/008

Abstract: A droplet generator, for an EUV radiation source, comprises: a capillary in which, in use, molten material flows; an actuator configured to modulate a pressure inside the capillary; and a controller configured to drive the actuator at a driving frequency; wherein the droplet generator is arranged such that, in use, the driving frequency is equal or about equal to a main resonance frequency of the molten material in the capillary.

公开(公告)号：US10990015B2

公开(公告)日：2021-04-27

申请号：US16318303

申请日：2017-06-22

Applicant: ASML Netherlands B.V.

Inventor： Michel Riepen ,  Paul Peter Anna Antonius Brom ,  Ronald Johannes Hultermans

IPC: G03F7/00 ,  G03F7/20 ,  H05G2/00

Abstract: A debris mitigation system for use in a radiation source. The debris mitigation system comprises a contamination trap. The contamination trap comprises a debris receiving surface arranged to receive liquid metal fuel debris emitted from a plasma formation region of the radiation source. The debris receiving surface is constructed from a material that reacts with the liquid metal fuel debris to form an intermetallic layer on the debris receiving surface.

公开(公告)号：US10750604B2

公开(公告)日：2020-08-18

申请号：US15781885

申请日：2016-11-22

Applicant: ASML NETHERLANDS B.V.

Inventor： Johan Frederik Dijksman ,  Wilhelmus Henricus Theodorus Maria Aangenent ,  Ronald Johannes Hultermans ,  Bastiaan Lambertus Wilhelmus Marinus Van De Ven ,  Peter Wilhelm Hendrik Van Putten

IPC: H05G2/00

Abstract: An EUV source for generating a beam of EUV radiation, has a droplet generator with a nozzle assembly to emit droplets of fuel from a nozzle towards a plasma formation location. The nozzle assembly receives the fuel from a reservoir. The nozzle assembly has a pump chamber receiving the fuel from the reservoir and an actuator to vibrate a membrane that forms a wall of the pump chamber. The wall is oriented perpendicularly to a direction wherein the nozzle emits the fuel. The nozzle assembly has first and second nozzle filters non-adjacently arranged in series in a path of the fuel from the pump chamber to the nozzle.

公开(公告)号：US09841680B2

公开(公告)日：2017-12-12

申请号：US14781262

申请日：2014-03-05

Applicant: ASML Netherlands B.V.

Inventor： Niek Antonius Jacobus Maria Kleemans ,  Denis Alexandrovich Glushkov ,  Ronald Johannes Hultermans ,  Benedictus Mathijs Renkens ,  Gerardus Hubertus Petrus Maria Swinkels ,  Christiaan Johannes Petrus Verspeek

IPC: G03F7/20 ,  H05G2/00

CPC classification number: G03F7/70033 ,  H05G2/003 ,  H05G2/008

Abstract: A source collector apparatus for use in a lithographic apparatus includes a fuel droplet generator configured in use to generate a stream of fuel droplets directed from an outlet of the fuel droplet generator towards a plasma formation location. In order to prevent droplet satellites from interfering with plasma formation, a gas supply is provided that in use provides a flow of gas (e.g., hydrogen) that deflects any droplet satellites out of the fuel droplet stream. Additionally, a detection apparatus may be provided as part of a shroud to determine the point at which coalescence of fuel droplets occurs thereby providing an indication of the likelihood of satellite droplets being present in the fuel droplet stream.

公开(公告)号：US20150293456A1

公开(公告)日：2015-10-15

申请号：US14443965

申请日：2013-10-30

Applicant: ASML NETHERLANDS B.V.

Inventor： Johan Frederik Dijksman ,  Ramin Badie ,  Ronald Johannes Hultermans ,  Dzmitry Labetski

IPC: G03F7/20 ,  B05B17/06 ,  H05G2/00

CPC classification number: G03F7/70033 ,  B05B17/06 ,  H05G2/005 ,  H05G2/006 ,  H05G2/008

Abstract: A droplet generator, for an EUV radiation source, comprises: a capillary in which, in use, molten material flows; an actuator configured to modulate a pressure inside the capillary; and a controller configured to drive the actuator at a driving frequency; wherein the droplet generator is arranged such that, in use, the driving frequency is equal or about equal to a main resonance frequency of the molten material in the capillary.

Abstract translation: 用于EUV辐射源的液滴发生器包括：毛细管，其中在使用中熔融材料流动; 构造成调节毛细管内的压力的致动器; 以及控制器，其构造成以驱动频率驱动所述致动器; 其中所述液滴发生器被布置为使得在使用中，所述驱动频率等于或大致等于所述毛细管中的熔融材料的主共振频率。

公开(公告)号：US09964852B1

公开(公告)日：2018-05-08

申请号：US15803448

申请日：2017-11-03

Applicant: ASML Netherlands B.V.

Inventor： Niek Antonius Jacobus Maria Kleemans ,  Denis Alexandrovich Glushkov ,  Ronald Johannes Hultermans ,  Benedictus Mathijs Renkens ,  Gerardus Hubertus Petrus Maria Swinkels ,  Christiaan Johannes Petrus Verspeek

IPC: G03F7/20 ,  H05G2/00

CPC classification number: G03F7/70033 ,  H05G2/003 ,  H05G2/008

Abstract: A source collector apparatus for use in a lithographic apparatus includes a fuel droplet generator configured in use to generate a stream of fuel droplets directed from an outlet of the fuel droplet generator towards a plasma formation location. In order to prevent droplet satellites from interfering with plasma formation, a gas supply is provided that in use provides a flow of gas (e.g., hydrogen) that deflects any droplet satellites out of the fuel droplet stream. Additionally, a detection apparatus may be provided as part of a shroud to determine the point at which coalescence of fuel droplets occurs thereby providing an indication of the likelihood of satellite droplets being present in the fuel droplet stream.

公开(公告)号：US09462667B2

公开(公告)日：2016-10-04

申请号：US14377586

申请日：2013-01-03

Applicant: ASML Netherlands B.V.

Inventor： Johan Frederik Dijksman ,  Ronald Johannes Hultermans ,  Antonius Theodorus Wilhelmus Kempen ,  Ramin Badie

IPC: G03B27/32 ,  G03B27/54 ,  H05G2/00 ,  G03F7/20

CPC classification number: H05G2/006 ,  G03F7/70033 ,  G03F7/70908 ,  G03F7/70916 ,  H05G2/005

Abstract: The present invention provides methods and apparatus for facilitating the start up of a fuel droplet stream generator. During a start-up phase the fuel droplet stream generator is positioned so that the fuel droplets re emitted downwardly whereby gravity assists in the establishment of the stream. The droplets are monitored using a visualization system and once the stream is determined to have the desired characteristics the stream generator is moved to a second position of steady state use in which the droplet stream is emitted in a horizontal direction.

Abstract translation: 本发明提供了一种便于启动燃料液滴流发生器的方法和装置。 在起动阶段期间，燃料液滴流发生器被定位成使得燃料液滴向下发射，由此重力有助于流的建立。 使用可视化系统监测液滴，并且一旦流被确定为具有期望的特性，则流发生器被移动到液晶流在水平方向上发射的稳态使用的第二位置。