公开(公告)号：WO2021032484A1

公开(公告)日：2021-02-25

申请号：PCT/EP2020/072006

申请日：2020-08-05

Applicant: ASML NETHERLANDS B.V. ,  IMEC v.z.w.

Inventor： HASPESLAGH, Luc, Roger, Simonne ,  ROCHUS, Veronique ,  BRONDANI TORRI, Guilherme ,  HALBACH, Alexandre ,  PANDEY, Nitesh ,  GOORDEN, Sebastianus, Adrianus

IPC: G03F7/20 ,  G02B26/08

Abstract: A micromirror array comprises a substrate, a plurality of mirrors for reflecting incident light, and for each mirror of the plurality of mirrors, a respective post connecting the substrate to the mirror. The micromirror array further comprises, for each mirror of the plurality of mirrors, one or more electrostatic actuators connected to the substrate for applying force to the post to displace the post relative to the substrate, thereby displacing the mirror. Also disclosed is a method of forming such a micromirror array. The micromirror array may be used in a programmable illuminator. The programmable illuminator may be used in a lithographic apparatus and/or in an inspection apparatus.

公开(公告)号：WO2021032483A1

公开(公告)日：2021-02-25

申请号：PCT/EP2020/072005

申请日：2020-08-05

Applicant: ASML NETHERLANDS B.V. ,  IMEC V.Z.W.

Inventor： HASPESLAGH, Luc, Roger, Simonne ,  ROCHUS, Veronique ,  BRONDANI TORRI, Guilherme ,  PANDEY, Nitesh ,  GOORDEN, Sebastianus, Adrianus

IPC: G03F7/20 ,  G02B26/08 ,  G02B7/18 ,  H02N2/00

Abstract: A micromirror array comprises a substrate, a plurality of mirrors for reflecting incident light and, for each mirror (20) of the plurality of mirrors, at least one piezoelectric actuator (21) for displacing the mirror, wherein the at least one piezoelectric actuator is connected to the substrate. The micromirror array further comprises one or more pillars (24) connecting the mirror to the at least one piezoelectric actuator. Also disclosed is a method of forming such a micromirror array. The micromirror array may be used in a programmable illuminator. The programmable illuminator may be used in a lithographic apparatus and/or in an inspection apparatus.

公开(公告)号：EP4018264A1

公开(公告)日：2022-06-29

申请号：EP20749909.6

申请日：2020-08-05

Applicant: ASML Netherlands B.V. ,  IMEC VZW

Inventor： HASPESLAGH, Luc, Roger, Simonne ,  ROCHUS, Veronique ,  BRONDANI TORRI, Guilherme ,  PANDEY, Nitesh ,  GOORDEN, Sebastianus, Adrianus

IPC: G03F7/20 ,  G02B26/08 ,  G02B7/18 ,  H02N2/00

公开(公告)号：EP4018265A1

公开(公告)日：2022-06-29

申请号：EP20750273.3

申请日：2020-08-05

Applicant: ASML Netherlands B.V. ,  IMEC VZW

Inventor： HASPESLAGH, Luc Roger Simonne ,  ROCHUS, Veronique ,  BRONDANI TORRI, Guilherme ,  HALBACH, Alexandre ,  PANDEY, Nitesh ,  GOORDEN, Sebastianus Adrianus

IPC: G03F7/20 ,  G02B26/08