公开(公告)号：NL2012843A

公开(公告)日：2014-11-26

申请号：NL2012843

申请日：2014-05-20

Applicant: ASML NETHERLANDS BV

Inventor： FRISSEN PETRUS ,  FOCKERT GEORGE ,  JANSEN GERARDUS

IPC: G03F7/20

公开(公告)号：SG121780A1

公开(公告)日：2006-05-26

申请号：SG200303707

申请日：2003-06-10

Applicant: ASML NETHERLANDS BV

Inventor： FRISSEN PETRUS ,  CAROLUS MARIA ,  COMPTER JOHAN ,  CORNELI S ,  TABOR ROB

IPC: G03B27/00 ,  G03F7/20 ,  H01L21/027 ,  H02K3/18 ,  H02K3/32 ,  H02K41/03

Abstract: A coil 20 for use in an actuator in a lithographic projection apparatus. The coil 20 is formed of a strip 21 of electrically conducting sheet-material that is wound round a winding axis 22. Respective turns of the strip 21 of sheet-material are separated by an electrically non-conducting layer 25.