公开(公告)号：JP2003109898A

公开(公告)日：2003-04-11

申请号：JP2002225373

申请日：2002-06-28

Applicant: ASML NETHERLANDS BV

Inventor： BUTLER HANS ,  VERBEEK THIJS REIN

IPC: G03F7/20 ,  H01L21/027

Abstract: PROBLEM TO BE SOLVED: To reduce unnecessary vibration bringing fading of a pattern projected on a target part of a substrate in continuously vibrational movement in a projection system. SOLUTION: The vibrational movement is attained to be measured by a detection means. The detection means generates a motion signal, a control means responds thereto, and at this time the control means generates a control signal. Preferable algorithm used for generating the control signal is based on a method referred to as H infinity. The control signal is given to a drive means. The drive means compensates vibration of a projection lens, thereby improving image formation accuracy of the pattern projected on the substrate.