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公开(公告)号：KR20180066209A
公开(公告)日：2018-06-18
申请号：KR20187013422
申请日：2016-09-21
Applicant: ASML NETHERLANDS BV
Inventor： WANG TE SHENG
CPC classification number: G03F7/70558 , G03F7/70625 , G03F7/70641 , H01L22/12
Abstract: 본명세서에서, 패터닝공정에의해생성된기판의부분으로부터패터닝공정의직접측정가능한처리파라미터의값을측정하는단계; 직접측정가능한처리파라미터와직접측정가능하지않은처리파라미터간의관계를얻는단계; 및직접측정가능한처리파라미터의값 및관계로부터직접측정가능하지않은처리파라미터의값을결정하는단계를포함하는방법이개시된다.
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