公开(公告)号：US20250069932A1

公开(公告)日：2025-02-27

申请号：US18724495

申请日：2022-11-25

Applicant: ASML Netherlands B.V.

Inventor： Martinus Cornelis REIJNEN ,  Thomas POIESZ ,  René Adrianus VAN ROOIJ ,  Alexander Barbara Jacobus Maria DRIESSEN ,  Keane Michael LEVY

IPC: H01L21/683

Abstract: The invention provides an object holder to hold an object, comprising: a clamp side to clamp the object, wherein the clamp side is electrically conductive, at least one electrode arranged at a distance from the clamp side, and electrically isolated from the clamp side, a controller arranged to provide an electrode voltage to the at least one electrode based on a measured charge signal representative for a charge level of the object holder and/or the object in order to decrease a potential difference between an electrical potential of the clamp side and an electrical potential of the object.