公开(公告)号：US20240385536A1

公开(公告)日：2024-11-21

申请号：US18696657

申请日：2022-10-14

Applicant: ASML Netherlands B.V.

Inventor： Thomas Poiesz ,  René Adrianus Van Rooij ,  Alexander Stein

IPC: G03F7/00 ,  G03F7/16 ,  H01L21/683

Abstract: The disclosure provides a clamp comprising a dielectric member; a conductive element disposed on the dielectric member and comprised of a first conductive material; and a number of burls arranged on the conductive element for supporting the object, each burl comprising a second conductive material, wherein the clamp comprises a stack of alternating layers of etch resistant material and a third conductive material arranged between the conductive element and the number of burls.