CLAMP FOR HOLDING AN OBJECT AND METHOD

    公开(公告)号:US20240385536A1

    公开(公告)日:2024-11-21

    申请号:US18696657

    申请日:2022-10-14

    Abstract: The disclosure provides a clamp comprising a dielectric member; a conductive element disposed on the dielectric member and comprised of a first conductive material; and a number of burls arranged on the conductive element for supporting the object, each burl comprising a second conductive material, wherein the clamp comprises a stack of alternating layers of etch resistant material and a third conductive material arranged between the conductive element and the number of burls.

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