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公开(公告)号:US20240385536A1
公开(公告)日:2024-11-21
申请号:US18696657
申请日:2022-10-14
Applicant: ASML Netherlands B.V.
Inventor: Thomas Poiesz , René Adrianus Van Rooij , Alexander Stein
IPC: G03F7/00 , G03F7/16 , H01L21/683
Abstract: The disclosure provides a clamp comprising a dielectric member; a conductive element disposed on the dielectric member and comprised of a first conductive material; and a number of burls arranged on the conductive element for supporting the object, each burl comprising a second conductive material, wherein the clamp comprises a stack of alternating layers of etch resistant material and a third conductive material arranged between the conductive element and the number of burls.