公开(公告)号：US09939737B2

公开(公告)日：2018-04-10

申请号：US14761957

申请日：2013-12-05

Applicant: ASML Netherlands B.V.

Inventor： Petrus Augustinus Franciscus Klomp ,  Bastiaan Matthias Mertens ,  Arnoud Willem Notenboom

IPC: G03F7/20 ,  H01L21/683 ,  H01L21/687 ,  H02N13/00

CPC classification number: G03F7/70708 ,  H01L21/6831 ,  H01L21/6833 ,  H01L21/6875 ,  H02N13/00

Abstract: An electrostatic clamp (12) comprising an electrode (2), a layer of resistive material (6) located on the electrode, and a layer of dielectric (8) located on the resistive material, wherein the electrostatic clamp further comprises burls (10) which project from the layer of dielectric.