公开(公告)号：EP3611770A1

公开(公告)日：2020-02-19

申请号：EP18189293.6

申请日：2018-08-16

Applicant: ASML Netherlands B.V.

Inventor： JANSEN, Bas ,  BUTLER, Hans ,  DIJKSHOORN, Alexander Pascal

IPC: H01L41/09 ,  G03F7/20

Abstract: The disclosed piezo actuator (40) comprises a piezoelectric material (42), preferably cube-shaped, having first and second surfaces (44, 46) along first and second directions (x, y). A first set of electrodes (410) is arranged on the first and second surfaces to elongate the piezoelectric material in a third direction (z), perpendicular to the first and second directions, by providing at least two different voltages or charges simultaneously. A second electrode set (420) is arranged on further surfaces (430, 432) to shear the piezoelectric material in the first or second direction. The actuator is useful for mask or substrate supports of a lithographic apparatus.