公开(公告)号：US20230367224A1

公开(公告)日：2023-11-16

申请号：US18225439

申请日：2023-07-24

Applicant: ASML Netherlands B.V.

Inventor： Hrishikesh PATEL ,  Yue MA ,  Günes MAKIBOGLU ,  Albert Pieter RIJPMA ,  Antonius Johannus VAN DER NET ,  Rens Henricus VERHEES ,  Zongquan YANG

IPC: G03F7/00 ,  H05G2/00

CPC classification number: G03F7/70033 ,  G03F7/70916 ,  H05G2/005 ,  H05G2/008

Abstract: A radiation source includes a fuel supply, a collector, a debris mitigation system, and a temperature control system. The fuel supply device supplies fuel. The excitation device excites the fuel into a plasma. The collector collects radiation emitted by the plasma and directs the radiation to a beam exit. The debris mitigation system collects debris generated by the plasma and has a first component having a first conduit passing therethrough and a second component having a second conduit passing therethrough. The temperature control system increases or decreases temperatures of the first component and the second component by selectively heating or cooling a thermal transfer fluid circulating through the respective conduit. The temperature control system cools the first component to a first temperature that is below the melting point of the fuel and heats the second component to a second temperature that is above the melting point of the fuel.