公开(公告)号：US20180299783A1

公开(公告)日：2018-10-18

申请号：US15767524

申请日：2016-10-26

Applicant: ASML Netherlands B.V.

Inventor： Alexander Petrus Josephus VAN LANKVELT ,  Ingmar August KERP ,  Richardus Simon Antonius OOSTVEEN ,  Marco Hendrikus Hermanus OUDE NIJHUIS ,  Robertus Mathijs Gerardus RIJS ,  Olav Johannes SEIJGER ,  Alexander Maurice STEENHOEK

IPC: G03F7/20 ,  F16F15/02 ,  F16J15/52

CPC classification number: G03F7/709 ,  F16F15/02 ,  F16J15/52 ,  G03F7/70341 ,  G03F7/70775 ,  G03F7/70825 ,  G03F7/70833

Abstract: The invention relates to a vibration isolation system (VIS) comprising:—a base (10);—a coupling element (20) to be coupled to a vibration sensitive object;—a vibration isolator (30-34) arranged between the base and the coupling element;—a bellows (50) to be arranged between the VIS coupling element or the vibration isolator and a protective housing (40) surrounding the vibration sensitive object; and—one or more separate damping elements to act on convolutions of the bellow,