公开(公告)号：US20220299365A1

公开(公告)日：2022-09-22

申请号：US17636308

申请日：2020-07-23

Applicant: ASML Netherlands B.V.

Inventor： Gerbrand VAN DER ZOUW ,  Marinus Johannes Maria VAN DAM ,  Jacob SONNEVELD ,  Ramon Pascal VAN GORKOM

IPC: G01J3/12 ,  G01J3/02 ,  G03F7/20

Abstract: Disclosed is a wavelength selection module for a metrology apparatus. The wavelength selection module comprises one or more filter elements being operable to receive an input radiation beam comprising multiple wavelengths to provide selective control of a wavelength characteristic of a corresponding output radiation beam. At least one of said one or more filter elements comprises at least two linear variable filters.