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公开(公告)号：US20210262593A1
公开(公告)日：2021-08-26
申请号：US17270658
申请日：2019-08-12
Applicant: ASML Netherlands B.V.
Inventor： Jon David TEDROW , David BESSEMS , Wei-Hsun CHEN
Abstract: A conduit suitable for use in a high temperature, high pressure environment, the conduit having an elongate portion made of a first refractory metal and a fitting portion made of a second refractory metal attached to an axial end of the elongate portion. The attachment may be made by welding and the second refractory metal may have a greater yield strength than the first refractory metal.
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