公开(公告)号：US11043356B2

公开(公告)日：2021-06-22

申请号：US16700552

申请日：2019-12-02

Applicant: ASML Netherlands B.V.

Inventor： Wei Fang ,  Kevin Liu ,  Fei Wang ,  Jack Jau ,  Zhaohui Guo

IPC: H01J37/20 ,  H01J37/06 ,  H01J37/22 ,  H01J37/30 ,  H01J37/304

Abstract: A calibration method for calibrating the position error in the point of interest induced from the stage of the defect inspection tool is achieved by controlling the deflectors directly. The position error in the point of interest is obtained from the design layout database.