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公开(公告)号：US11041816B2
公开(公告)日：2021-06-22
申请号：US15839299
申请日：2017-12-12
Applicant: ASML Netherlands B.V.
Inventor： Maxim Pisarenco , Frank Stefan Schneider , Markus Gerardus Martinus Maria Van Kraaij , Martijn Constant Van Beurden
IPC: G01N21/956 , G03F7/20 , G01N21/95
Abstract: Disclosed is a method for reconstructing a parameter of a lithographic process. The method comprises the step of designing a preconditioner suitable for an input system comprising the difference of a first matrix and a second matrix, the first matrix being arranged to have a multi-level structure of at least three levels whereby at least two of said levels comprise a Toeplitz structure. One such preconditioner is a block-diagonal matrix comprising a BTTB structure generated from a matrix-valued inverse generating function. A second such preconditioner is determined from an approximate decomposition of said first matrix into one or more Kronecker products.
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公开(公告)号：US20180164229A1
公开(公告)日：2018-06-14
申请号：US15839299
申请日：2017-12-12
Applicant: ASML Netherlands B.V.
Inventor： Maxim Pisarenco , Frank Stefan Schneider , Markus Gerardus Martinus Maria Van Kraaij , Martijn Constant Van Beurden
IPC: G01N21/956 , G03F7/20 , G01N21/95
CPC classification number: G01N21/95607 , G01N21/9501 , G03F7/705 , G03F7/70625
Abstract: Disclosed is a method for reconstructing a parameter of a lithographic process. The method comprises the step of designing a preconditioner suitable for an input system comprising the difference of a first matrix and a second matrix, the first matrix being arranged to have a multi-level structure of at least three levels whereby at least two of said levels comprise a Toeplitz structure. One such preconditioner is a block-diagonal matrix comprising a BTTB structure generated from a matrix-valued inverse generating function. A second such preconditioner is determined from an approximate decomposition of said first matrix into one or more Kronecker products.
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公开(公告)号：US09766552B2
公开(公告)日：2017-09-19
申请号：US14915804
申请日：2014-08-08
Applicant: ASML Netherlands B.V.
Inventor： Martijn Constant Van Beurden
CPC classification number: G03F7/70483 , G01B2210/56 , G01N21/956 , G03F7/705 , G03F7/70625 , G03F7/70633 , H01L22/12
Abstract: A method of calculating electromagnetic scattering properties of a structure, the structure including materials of differing properties and the structure being periodic in at least one lateral direction and extending in a vertical direction, comprises: numerically solving a volume integral equation for electromagnetic scattering for a plurality of modes in the at least one lateral direction, by performing, for each respective mode, integration (1350) of a pseudo-spectral polynomial (Chebyshev) expansion in the vertical direction multiplied by a ID Green's function using the same sample points in the orthogonal direction for all of the plurality of modes. The integration is performed by solving a regularized linear system of equations between first (1116) and second (1120) discrete transformation steps to compute (1118) values of a regularized Chebyshev expansion coefficient vector (γ). Electromagnetic scattering properties of the structure are calculated using the results of the numerical solution.
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