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公开(公告)号：US20250014857A1
公开(公告)日：2025-01-09
申请号：US18709795
申请日：2022-10-19
Applicant: ASML Netherlands B.V.
Inventor： Shaoqian WANG , Peter Paul HEMPENIUS , Ying LUO , Omar ALJANAIDEH
Abstract: Systems, apparatuses, and methods for reducing vibration of a chamber may include obtaining predefined motion data associated with a transferring device stiffly coupled to a chamber; determining movement of the transferring device based on the predefined motion data before the transferring device moves; determining, based on the movement, a first force to be applied to the chamber caused by the movement; and causing a support device of the chamber to apply a second force to the chamber to counteract the first force when the transferring device moves.
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