公开(公告)号：EP4343827A1

公开(公告)日：2024-03-27

申请号：EP22196903.3

申请日：2022-09-21

Applicant: ASML Netherlands B.V.

Inventor： PARAYIL VENUGOPALAN, Syam ,  RAVICHANDRAN, Arvind

IPC: H01L23/00 ,  H01L25/00

Abstract: A device for aligning and placing electrical components includes a first stage to support at least one first electrical component, each first electrical component having a plurality of conductive surfaces on a side opposite the first stage, a second stage to support at least one second electrical component, each second electrical component having a plurality of conductive surfaces on a side opposite the second stage, a voltage source to produce a voltage between the conductive surfaces of the first electrical components and conductive surfaces of the second electrical components, and a controller to control relative motion between the first stage and the second stage, and to align corresponding ones of the plurality of conductive surfaces of the first electrical component with corresponding ones of the plurality of conductive surfaces on the second electrical component at least partially on the basis of an electrostatic force therebetween.

公开(公告)号：EP4343472A1

公开(公告)日：2024-03-27

申请号：EP22196685.6

申请日：2022-09-20

Applicant: ASML Netherlands B.V.

Inventor： KOULIERAKIS, Eleftherios ,  GONZALEZ HUESCA, Juan Manuel ,  SMAL, Pavel ,  AARDEN, Frans, Bernard ,  RAVICHANDRAN, Arvind ,  DOU, Meng ,  HUBAUX, Arnaud ,  VAN HERTUM, Pieter

IPC: G05B19/418

Abstract: One embodiment relates to a method of classifying product units subject to a process performed by an apparatus, the method comprising: receiving KPI data, the KPI data associated with a plurality of components of the apparatus and comprising data associated with a plurality of KPIs; clustering the KPI data to identify a plurality of clusters; analyzing the plurality of clusters to identify a plurality of failure modes associated with the apparatus, for each identified failure mode assigning a threshold to each KPI associated with the failure mode; and for each of the plurality of product units: determining the likelihood of each of the plurality of failure modes based on KPI data of the product unit and the thresholds assigned to each KPI associated with one of the plurality of failure modes; and performing a classification based on the likelihoods of each of the plurality of failure modes.

公开(公告)号：EP4325229A1

公开(公告)日：2024-02-21

申请号：EP22190849.4

申请日：2022-08-17

Applicant: ASML Netherlands B.V.

Inventor： RAVICHANDRAN, Arvind ,  PARAYIL VENUGOPALAN, Syam

IPC: G01R31/312

Abstract: A device (201) for inspecting a conductive pattern (202) on a substrate (200) includes a plurality of sensor plates (204), a table configured and arranged to support the substrate , a voltage source (208), configured to generate an electric field between the sensor plates and the conductive pattern on the substrate, an actuator (206), configured to move the sensor plates relative to the substrate, a controller (210), the controller configured and arranged to identify regions having defect on the basis of changes in capacitance between the sensor plates and the substrate as the sensor plates are moved relative to the substrate.