公开(公告)号：US20230314964A1

公开(公告)日：2023-10-05

申请号：US18001256

申请日：2021-05-10

Applicant: ASML Netherlands B.V.

Inventor： José Nilton FONSECA JUNIOR ,  Zhuangxiong HUANG ,  Franciscus Johannes Leonardus HEUTZ ,  Ferdy MIGCHELBRINK ,  Henricus Anita Jozef Wilhelmus VAN DE VEN ,  Ramo OMEROVIC ,  Emericus Antoon Theodorus VAN DEN AKKER

IPC: G03F7/20 ,  G03F1/48 ,  G03F1/46

CPC classification number: G03F7/70933 ,  G03F7/70958 ,  G03F7/70808 ,  G03F1/48 ,  G03F1/46

Abstract: The present invention provides a fluid purging system (100) for an optical element (120), comprising a fluid guiding unit arranged to guide a fluid, provided by a fluid supply system, over at least a curved portion of an optical surface (122) of the optical element. The fluid guiding unit comprises a fluid inlet and a first nozzle unit (110) for providing a fluid to the optical surface. The fluid guiding unit being formed by at least a first wall portion (102) and at least a second wall portion (104), wherein the second wall portion being configured to face the optical surface and to follow a contour of the optical surface. The second wall portion comprises a second nozzle unit (112).