公开(公告)号：US20150103325A1

公开(公告)日：2015-04-16

申请号：US14395979

申请日：2013-03-19

Applicant: ASML Netherlands B.V.

Inventor： Ronald Van Der Wilk ,  Roger Schmitz ,  Arnoud Willem Notenboom ,  Manon Elise Will

IPC: G03F7/20

CPC classification number: G03F7/70708 ,  G03F7/70875 ,  H01L21/6831

Abstract: An electrostatic clamp (21) configured to hold an object, the electrostatic clamp comprising an electrode (24), a resistive portion (23) formed from a resistive material located on the electrode, and a dielectric portion (22) formed from a dielectric material located on the resistive portion.

Abstract translation: 一种构造成保持物体的静电夹具（21），所述静电夹具包括电极（24），由位于所述电极上的电阻材料形成的电阻部分（23）和由电介质材料形成的电介质部分 位于电阻部分上。