公开(公告)号：EP4538796A1

公开(公告)日：2025-04-16

申请号：EP23202760.7

申请日：2023-10-10

Applicant: ASML Netherlands B.V.

Inventor： GKOROU, Dimitra ,  SHANKAR, Aditya ,  KHEDEKAR, Satej ,  CHEN, Yiyu Lydia ,  DECOUCHANT, Jérémie, Éric, Alphonse, Pierre

IPC: G03F7/20

Abstract: Training a machine learning model used by different participants is described. Vertically federated learning is used to train the model with time series data sets. Time series data sets received from different participants are aligned, with each time series data set comprising different features corresponding to one or more samples common to each participant, but preserving the privacy of each time series data set for participants. First model parameters are received from a first participant. These are determined based on the aligning and first features provided by the first participant in a first time series data set. Second model parameters are received from a second participant. These are determined based on the aligning, second features provided by the second participant in a second time series data set, and semiconductor manufacturing process outputs associated with the second features. The model is trained based on the first and second model parameters.