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公开(公告)号：EP4465768A1
公开(公告)日：2024-11-20
申请号：EP23174083.8
申请日：2023-05-17
Applicant: ASML Netherlands B.V.
IPC: H05G2/00
Abstract: There is provided a droplet generator comprising: a conduit comprising an orifice configured to fluidly couple to a reservoir and to emit molten target material in a molten target material direction; a plurality of piezo elements (17) at least partially surrounding the conduit, characterized in that at least one of the piezo elements in configured to operate in shear mode such that shear motion of the at least one piezo element is in the molten target material direction.
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