公开(公告)号：US20020110759A1

公开(公告)日：2002-08-15

申请号：US09955705

申请日：2001-09-18

Applicant: AU Optronics Corp.

Inventor： Chien-Ho LIN ,  Chung-Wang CHOU

IPC: H01J009/00

CPC classification number: H01J9/242 ,  H01J2211/36

Abstract: A method of forming barrier ribs used in plasma display panels (PDP) is provided. The barrier ribs are formed on a substrate, and the substrate includes a dielectric layer and a rib material layer formed on the dielectric layer. First, a first bottom pattern layer, a second bottom pattern layer and a third bottom pattern layer are formed on the rib material layer. These bottom pattern layers have the same width and are spaced apart to each other with the same distance. Second, a first middle pattern layer, a second middle pattern layer, and a third middle pattern layer are respectively formed above the first bottom pattern layer, the second bottom pattern layer, and the third bottom pattern layer. The left sidewalls of the first middle pattern layer and the first bottom pattern layer are aligned, the right sidewalls of the second middle pattern layer and the second bottom pattern layer are aligned, and the two sidewalls of the third middle pattern layer and the third bottom pattern layer are respectively aligned. Then, a first top pattern layer, and a second top pattern layer are respectively formed above the first middle pattern layer and the third middle pattern layer. The left sidewall of the first top pattern layer and the first middle pattern layer is aligned, and the right sidewall of the second top pattern layer and the third middle pattern layer is aligned. Next, a sandblasting process is performed by using the bottom pattern layers, the middle pattern layers, and the top pattern layers as a mask, parts of the rib material layer is removed to exposed parts of the dielectric layer. Finally, the barrier ribs are completed formed by removing the bottom pattern layers, the middle pattern layers, and the top pattern layers.

Abstract translation: 提供了一种形成用于等离子体显示面板（PDP）的隔壁的方法。 阻挡肋形成在基板上，并且基板包括介电层和形成在电介质层上的肋材料层。 首先，在肋材料层上形成第一底图案层，第二底图案层和第三底图案层。 这些底部图案层具有相同的宽度并以相同的距离彼此间隔开。 第二，第一中间图案层，第二中间图案层和第三中间图案层分别形成在第一底部图案层，第二底部图案层和第三底部图案层之上。 第一中间图案层和第一底部图案层的左侧壁对准，第二中间图案层和第二底部图案层的右侧壁对准，并且第三中间图案层和第三底部图案层的两个侧壁 图案层分别对齐。 然后，分别在第一中间图案层和第三中间图案层的上方形成第一顶部图案层和第二顶部图案层。 第一顶部图案层和第一中间图案层的左侧壁对准，并且第二顶部图案层和第三中间图案层的右侧壁对准。 接下来，通过使用底部图案层，中间图案层和顶部图案层作为掩模来进行喷砂处理，将肋材料层的一部分去除到介电层的暴露部分。 最后，通过去除底部图案层，中间图案层和顶部图案层而形成障壁。