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公开(公告)号：WO2020097105A1
公开(公告)日：2020-05-14
申请号：PCT/US2019/059903
申请日：2019-11-05
Applicant: AXSUN TECHNOLOGIES, INC.
Inventor： GETZ, James, W. , WHITNEY, Peter S.
IPC: H01S5/183
Abstract: A MEMS tunable VCSEL includes a membrane device having a mirror and a distal-side electrostatic cavity for displacing the mirror to increase a size of an optical cavity. A VCSEL device includes an active region for amplifying light. Then, a proximal-side electrostatic cavity is defined between the VCSEL device and the membrane device is used to displace the mirror to decrease a size of an optical cavity.
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