公开(公告)号：US20030085196A1

公开(公告)日：2003-05-08

申请号：US10007502

申请日：2001-11-08

Applicant: AXSUN Technologies, Inc.

Inventor： Jonathan R. Coppeta

IPC: B29D011/00 ,  C03C015/00

CPC classification number: C03C19/00 ,  C03C15/00

Abstract: A technique for fabricating the required surface shapes for micro optical elements, such as curved micro mirrors and lenses, starts with a simple, binary for example, approximation to the desired surface shape. Then polishing, e.g., chemical mechanical polishing (CMP), is used to form the smooth optical surface. Specifically, starting with a mesa or blind hole, with a mesa profile, a smooth mirror or lens structure is fabricated.

Abstract translation: 用于制造微型光学元件（例如弯曲微型反射镜和透镜）的所需表面形状的技术从简单的二进制开始，例如近似于所需的表面形状。 然后使用抛光，例如化学机械抛光（CMP）来形成光滑的光学表面。 具体来说，从台面形状的台面或盲孔开始，制造平滑的镜面或透镜结构。