Abstract:
An aqueous alkaline developing solution comprising a (co)polymer comprising a monomeric unit which is represented by the following formula I:
wherein L is a linking group; R 1 , R 2 and R 3 independently represent hydrogen or an alkyl group; R 4 represents an optionally substituted hydroxyaryl group; x = 0 or 1; y = 0 or 1 and when y = 0 than x = 1 and L is further bound to C * to form a cyclic structure.
Abstract translation:在wässrige碱性显影溶液包含(共)聚合物,其包含的单体单元的所有其由下式I表示:worin L为连接基团; R 1,R 2和R 3独立地代表氢或烷基的; ,R 4 darstellt到任选取代的羟基芳基; X = 0或1; Y = 0或1,并且当y = 0比x = 1且L被进一步结合到C *形成环结构。