公开(公告)号：EP4306920A1

公开(公告)日：2024-01-17

申请号：EP23185102.3

申请日：2023-07-12

Applicant: Andor Technology Limited

Inventor： DENNIS, Andrew ,  SIMMS, Richard

IPC: G01J3/44 ,  G01J3/02 ,  G01J3/06 ,  G02B21/00 ,  G01J3/18

Abstract: A Raman spectroscopy apparatus comprises an imaging optical system that transmits light from an object to a spectrograph along an optical path. A scanning device intersects, and is movable with respect to, the optical path. Light is directed onto the scanning device to illuminate the object at a plurality of illumination points. The imaging optical system transmits Raman scattered light emitted from the object at the illumination points to an intermediate image plane, the scanning device being located at the intermediate image plane, and transmits the Raman scattered light from the intermediate image plane to the spectrograph. In comparison with conventional confocal Raman spectroscopy, the apparatus can perform Raman analysis of a sample more quickly, and in comparison with conventional line scan Raman spectroscopy the apparatus can perform Raman analysis more accurately.