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公开(公告)号:US20250113138A1
公开(公告)日:2025-04-03
申请号:US18765989
申请日:2024-07-08
Applicant: Apple Inc.
Inventor: Gokhan Hatipoglu , Peter C. Hrudey , Vahid Naderyan
Abstract: An apparatus comprising: a microelectromechanical systems (MEMS) chip having a movable member coupled to a front chamber; and an attenuator chip coupled to the MEMS chip and having an array of attenuators arranged around a port that is open to the front chamber.