公开(公告)号：US20220181601A1

公开(公告)日：2022-06-09

申请号：US17543322

申请日：2021-12-06

Applicant: Applied Materials, Inc.

Inventor： Alejandro SEVILLA ,  Ezhiylmurugan RANGASAMY ,  Subramanya P. HERLE ,  David Masayuki ISHIKAWA

IPC: H01M4/04

Abstract: A method and system for forming lithium anode devices are provided. In one embodiment, the methods and systems form pre-lithiated Group-IV alloy-type nanoparticles (NP's), for example, Li—Z where Z is Ge, Si, or Sn. In another embodiment, the methods and systems synthesize Group-IV nanoparticles and alloy the Group-IV nanoparticles with lithium. The Group-IV nanoparticles can be made on demand and premixed with anode materials or coated on anode materials. In yet another embodiment, the methods and systems form lithium metal-free silver carbon (“Ag—C”) nanocomposites (NC's). In yet another embodiment, a method utilizing silver (PVD) and carbon (PECVD) co-deposition to make anode coatings that can regulate lithium nucleation energy to minimize dendrite formation is provided.