公开(公告)号：US20240045399A1

公开(公告)日：2024-02-08

申请号：US18038441

申请日：2022-05-17

Applicant: Applied Materials, Inc.

Inventor： Qinglin Chai ,  Yue Ma ,  Liming Zhang ,  Xinhai Han ,  Chuan Ying Wang

IPC: G05B19/4099

CPC classification number: G05B19/4099 ,  G05B2219/45031

Abstract: A method includes receiving time trace sensor data associated with a substrate processing procedure. The substrate processing procedure includes two or more sets of processing conditions. At least a first set of processing conditions and a second set of processing conditions each include one or more operations performed repeatedly. The method further includes separating a first and second portion of the time trace sensor data corresponding to the first and second sets of processing conditions into a first and second plurality of cycle data. The method further includes processing the first plurality of cycle data and the second plurality of cycle data to generate summary data. The method further includes providing an alert to a user. The alert is based on the summary data.

公开(公告)号：US10896833B2

公开(公告)日：2021-01-19

申请号：US16403104

申请日：2019-05-03

Applicant: Applied Materials, Inc.

Inventor： Subrahmanyam Venkata Rama Kommisetti ,  Eda Tuncel ,  Shayne Smith ,  Liming Zhang ,  Sathyendra Ghantasala ,  Ryan Patz

IPC: H01L21/67 ,  G05B19/418 ,  G05B13/02 ,  G06Q10/06 ,  G06K9/52 ,  G06T7/00

Abstract: A method for detecting an endpoint of a seasoning process in a process chamber includes obtaining seasoning progress data indicating a progress of the seasoning process for each substrate of a first plurality of substrates, and collecting historical parameter values from a plurality of sensors disposed in the process chamber. The historical parameter values for each substrate of the first plurality of substrates are normalized with respect to a plurality of parameter values for a particular substrate in the first plurality of substrates. An MVA model is generated by applying a set of coefficients to the normalized parameter values for each substrate of the first plurality of substrates, and the set of coefficients are regressed based on the seasoning progress data. An end point of the seasoning process is determined using the MVA model with a plurality of substantially real-time parameter values measured when performing a seasoning process over each substrate of a second plurality of substrates.