公开(公告)号：US20230197922A1

公开(公告)日：2023-06-22

申请号：US17987477

申请日：2022-11-15

Applicant: Applied Materials, Inc.

Inventor： Sonal ,  David Masayuki ISHIKAWA ,  Sumedh Dattatraya ACHARYA ,  Ezhiylmurugan RANGASAMY ,  Subramanya P. HERLE

IPC: H01M4/04 ,  H01M10/0525 ,  H01M4/38 ,  H01M4/583

CPC classification number: H01M4/0419 ,  H01M4/38 ,  H01M4/583 ,  H01M10/0525 ,  H01M2004/027

Abstract: Embodiments of the present disclosure generally relate to electrode coatings and methods of coating electrodes. In an embodiment, a method of depositing a structure on a lithium ion battery (LIB) anode is provided. The method includes accelerating particles in a working gas through a convergent-divergent nozzle to a process velocity that is from a critical velocity of the particles to an erosion velocity of the LIB anode, the particles comprising a metal and/or a Group III-VI element; heating or cooling the particles in the working gas at a softening temperature; ejecting the particles in the working gas from a nozzle outlet of the convergent-divergent nozzle, the particles ejected at the process velocity, wherein at least a portion of the particles are in solid phase when ejected from the convergent-divergent nozzle; and depositing a first structure on the LIB anode, the first structure comprising the metal and/or the Group III-VI element.