Dielectric-enhanced metal coatings for MEMS tunable filters

    公开(公告)号:US10359551B2

    公开(公告)日:2019-07-23

    申请号:US13964169

    申请日:2013-08-12

    Abstract: The present invention concerns the use of hybrid metal-dielectric optical coatings as the end reflectors of laser cavities and/or in the mirror structures used in other optical resonators, such as Fabry-Perot tunable filters, along with the use of such Fabry-Perot tunable filters in wavelength swept sources such as lasers. Hybrid metal-dielectric optical coatings have reflectivity spectra that can be broader than pure dielectric coatings, offer optical reflectivities higher than metal, as high as pure dielectric coatings, eliminate mirror transmission that can cause parasitic light reflections, and use fewer layers and thus have lower mass and higher mechanical resonant frequency for movable mirror applications An important characteristic of these coatings concerns the non-reflected light. Pure dielectric coatings offer high reflectivity, while the non-reflected portion of the light is transmitted by the coating to the substrate, for example. When metal is added to the optical coating, the non-reflected portion of the light is absorbed by the metal and is not transmitted to the substrate or outside the cavity. Hybrid metal-dielectric coatings have broader and more uniform spectral reflection. Tunable lasers with performance enhanced by the hybrid metal-dielectric coatings can be used in optical coherence tomography and spectroscopic analysis applications.

    Dielectric-Enhanced Metal Coatings for MEMS Tunable Filters
    2.
    发明申请
    Dielectric-Enhanced Metal Coatings for MEMS Tunable Filters 审中-公开
    用于MEMS可调谐滤波器的介质增强金属涂层

    公开(公告)号:US20150043002A1

    公开(公告)日:2015-02-12

    申请号:US13964169

    申请日:2013-08-12

    Abstract: The present invention concerns the use of hybrid metal-dielectric optical coatings as the end reflectors of laser cavities and/or in the mirror structures used in other optical resonators, such as Fabry-Perot tunable filters, along with the use of such Fabry-Perot tunable filters in wavelength swept sources such as lasers. Hybrid metal-dielectric optical coatings have reflectivity spectra that can be broader than pure dielectric coatings, offer optical reflectivities higher than metal, as high as pure dielectric coatings, eliminate mirror transmission that can cause parasitic light reflections, and use fewer layers and thus have lower mass and higher mechanical resonant frequency for movable mirror applications An important characteristic of these coatings concerns the non-reflected light. Pure dielectric coatings offer high reflectivity, while the non-reflected portion of the light is transmitted by the coating to the substrate, for example. When metal is added to the optical coating, the non-reflected portion of the light is absorbed by the metal and is not transmitted to the substrate or outside the cavity. Hybrid metal-dielectric coatings have broader and more uniform spectral reflection. Tunable lasers with performance enhanced by the hybrid metal-dielectric coatings can be used in optical coherence tomography and spectroscopic analysis applications.

    Abstract translation: 本发明涉及使用混合金属 - 电介质光学涂层作为激光腔的端部反射器和/或用于其它光学谐振器的反射镜结构,例如法布里 - 珀罗可调谐滤光器,以及使用这种法布里 - 珀罗 波长扫描源(例如激光器)中的可调滤波器。 混合金属 - 介电光学涂层具有比纯电介质涂层更宽的反射光谱,提供高于金属的光学反射率,与纯电介质涂层一样高,消除可能引起寄生光反射的镜面透射,并且使用较少的层,因此具有较低的 可移动镜应用的质量和更高的机械共振频率这些涂层的一个重要特征涉及非反射光。 例如,纯电介质涂层提供高反射率,而光的未反射部分由涂层传播到基底。 当金属被添加到光学涂层中时,光的未反射部分被金属吸收,并且不被透射到基底或腔外。 混合金属 - 电介质涂层具有更广泛和更均匀的光谱反射。 通过混合金属 - 电介质涂层提高性能的可调谐激光器可用于光学相干断层扫描和光谱分析应用。

Patent Agency Ranking