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公开(公告)号：AT521692T
公开(公告)日：2011-09-15
申请号：AT03810398
申请日：2003-10-10
Applicant: BASF SE
Inventor： BOERNER MARC , KILIAN GERNOD , RHEIN RUDOLF , ARNOLD LUCIA , SCHUSTER MICHAEL , LEOPOLD ALEXANDER
IPC: C11D7/06 , C11D3/39 , C11D7/32 , C11D11/00 , H01L21/306
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