Patent search ap:("BECKER MICHAEL E") AND inv:"BECKER MICHAEL E" Page 1

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发明专利
Measurement unit for determining the directional dependence of the scatter properties of reflective or transmitting surfaces has detection optics for scattered rays whose aperture is smaller than a detector at the image plane 未知

公开(公告)号：DE102004015473B3

公开(公告)日：2005-08-11

申请号：DE102004015473

申请日：2004-03-26

Applicant: BECKER MICHAEL E

Inventor： BECKER MICHAEL E

IPC: G01N21/57 , G01N21/47 , G01N21/55

Abstract: Measurement unit in which the surface of a measurement object (MO) that is to be investigated is directly irradiated from a point radiation source (S). To detect the scatter distribution measurement rays (PL) originating from individual surface elements (dA) on the object surface are detected using optics (L) with an aperture that is smaller than a detector (D) placed at the image plane of the optics. The optics can be a lens or simply a pinhole aperture.

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