Thin film distributed rc structure
    3.
    发明授权
    Thin film distributed rc structure 失效
    薄膜分布式RC结构

    公开(公告)号:US3665346A

    公开(公告)日:1972-05-23

    申请号:US3665346D

    申请日:1969-10-16

    Inventor: ORR WILLIAM H

    CPC classification number: H01L27/016 C25D11/32 H05K1/167 H05K3/02 Y10T29/49124

    Abstract: This disclosure describes a thin film distributed RC circuit component consisting of an inert substrate, an anodizable resistive film, an oxide dielectric layer produced upon the film and a conductive counterelectrode deposited on the dielectric layer. The resistive film is a suitable refractory metal. A pattern of spaced apertures are etched through the conductive counterelectrode to but not beyond the underlying oxide layer. The apertures must be sufficiently large to pass an anodizing solution. By selecting the thickness and resistor pattern of the anodizable film, as well as the size and spacing of the apertures, the resulting component is readily adjusted as to frequency response or other characteristics.

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