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公开(公告)号：JPH1171672A
公开(公告)日：1999-03-16
申请号：JP17630898
申请日：1998-06-23
Applicant: BOC GROUP INC
Inventor： CHANG PING , SMITH P A JOEL
Abstract: PROBLEM TO BE SOLVED: To provide an improved pool height monitoring device to be used in an electronic beam evaporation system. SOLUTION: An evaporated material detector can be used as a pool height monitoring device in order to measure the position of an ingot rod 52. Detectors 60.74 are deposition rate monitoring devices, which are positioned so that the deposition is strongly dependent on the pool height position. The detector 60 may be installed at a position close to the flat surface of a crucible 58. The signal of the detectors strongly indicates whether or not the ingot rod 52 is above the surface of the crucible, and the position of the rod can be corrected so that the ingot rod is slightly above the upper end surface of the crucible 58. The rod position is thus kept to achieve the uniform deposition.
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公开(公告)号：JPH1161390A
公开(公告)日：1999-03-05
申请号：JP17630798
申请日：1998-06-23
Applicant: BOC GROUP INC
Inventor： HILL RUSSELL J , SMITH P A JOEL , CHANG PING
Abstract: PROBLEM TO BE SOLVED: To effectively utilize an expensive ingot rod by causing a roughly uniform evaporation pattern to an ingot rod surface. SOLUTION: In a rotational rod-fed electron beam evaporation source used together with a sublimation material, an ingot 34 can self-support for a crucible 38. This means a side face 34b of the ingot rod near a tip 34a of the ingot rod 34 is not brought into contact with the cooling crucible 38. By this method, a system can be operated at a position where an electron beam is not focused, sweeping of the electron beam can move beyond an edge 34b of the ingot rod tip 34a. By this method, by sweeping the ingot rod tip beyond the edge roughly in the radial direction, an roughly uniform evaporation pattern to the ingot rod surface is made possible, effective use of an expensive ingot rod material is made possible.
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公开(公告)号：CA2070457A1
公开(公告)日：1993-02-28
申请号：CA2070457
申请日：1992-06-04
Applicant: BOC GROUP INC
Inventor： HILL RUSSELL J , SMITH P A JOEL
IPC: H01J37/07 , H01J37/305 , H05B7/02
Abstract: An electron beam gun for an electron beam evaporation source in which a beam former (68) shields a filament (18) from an anode (56) such that electrons emitted from the filament are accelerated past the anode in a ribbon-like beam. The filament is connected to a split cathode block (12) having two sides (14,16) for applying an electric current through the filament. The beam former has two sections (74,76) with a vertical gap (78) therebetween and the sections are separately connected to the two sides of the cathode block such that the cathode block acts as a heat sink for the beam former, and a thermal gradient is not produced within the beam former that would produce warpage and movement of the beam former.
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公开(公告)号：CA2070457C
公开(公告)日：1996-04-30
申请号：CA2070457
申请日：1992-06-04
Applicant: BOC GROUP INC
Inventor： HILL RUSSELL J , SMITH P A JOEL
IPC: H01J37/07 , H01J37/305 , H05B7/02
Abstract: The present invention provides an electron beam gun for an electron beam evaporation source in which a beam former shields a filament from an anode such that electrons emitted from the filament are accelerated past the anode in a ribbon-like beam. The filament is connected to a split cathode block having two sides for applying an electric current through the filament. The beam former has two sections which are separately connected to the two sides of the cathode block such that the cathode block acts as a heat sink for the beam former, and a thermal gradient is not produced within the beam former that would produce warpage and movement of the beam former. Preferably, the vertical gap is about 0.254 mm. to prevent electrons emitted from the filament from arcing through the gap to the anode.
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公开(公告)号：CA2237280C
公开(公告)日：2007-01-02
申请号：CA2237280
申请日：1998-05-11
Applicant: BOC GROUP INC
Inventor： HILL RUSSELL J , SMITH P A JOEL , CHANG PING
Abstract: In a rotational rod-fed electron-beam evaporation source used with sublimating rod material, the ingot rod can be free-standing with respect to the crucible. This means that the side of the ingot rod near the tip of the rod does not contact a cooling crucible. In this way, the system can be operated in a defocused position of the electron beam, and the sweep of the electron beam can go over the edge of the ingot rod tip. Using these features, a substantially radial sweep of the tip of an ingot rod that sweeps over the edge can produce a substantially flat evaporation pattern on the ingot rod, producing a good utilization of the expensive ingot rod material.
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Patent Agency Ranking
公开(公告)号：DE69810704T2
公开(公告)日：2003-10-16
申请号：DE69810704
申请日：1998-06-19
Applicant: BOC GROUP INC
Inventor： HILL RUSSEL J , SMITH P A JOEL , CHANG PING
Abstract: An electron-beam evaporation system (30) comprising an ingot rod (34), the ingot rod having a bottom end (34c), a tip end (34a) and a side (34b); an electron-beam evaporation source (40) for evaporating the ingot rod; and a rotation mechanism (36) connected to the bottom end of the ingot rod adapted to rotate the ingot rod while the electron-beam evaporation source acts on the tip of the ingot rod, wherein the ingot rod is free-standing so that the ingot rod does not contact a cooling crucible (38) at the side of the ingot rod near the tip of the ingot rod.
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公开(公告)号：CA2237534A1
公开(公告)日：1998-12-23
申请号：CA2237534
申请日：1998-05-13
Applicant: BOC GROUP INC
Inventor： SMITH P A JOEL , CHANG PING
Abstract: An evaporated material detector can be used as a pool-height monitor to determine the position of an ingot rod. The detector is a deposition rate monitor that is positioned so that the deposition is strongly dependent on the pool height position. The detector can be positioned near the plane of the crucible for surface. The detector signal gives a strong indication whether the ingot rod is above the crucible surface, and the position of the rod can be modified so as to position the ingot rod slightly above the top surface of a crucible. In this way, the rod position can be maintained, producing a more uniform deposition.
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公开(公告)号：DE69213868D1
公开(公告)日：1996-10-24
申请号：DE69213868
申请日：1992-08-26
Applicant: BOC GROUP INC
Inventor： HILL RUSELL J , SMITH P A JOEL
IPC: H01J37/07 , H01J37/305
Abstract: An electron beam gun for an electron beam evaporation source in which a beam former (68) shields a filament (18) from an anode (56) such that electrons emitted from the filament are accelerated past the anode in a ribbon-like beam. The filament is connected to a split cathode block (12) having two sides (14,16) for applying an electric current through the filament. The beam former has two sections (74,76) with a vertical gap (78) therebetween and the sections are separately connected to the two sides of the cathode block such that the cathode block acts as a heat sink for the beam former, and a thermal gradient is not produced within the beam former that would produce warpage and movement of the beam former.
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公开(公告)号：GB2194384B
公开(公告)日：1991-02-13
申请号：GB8716685
申请日：1987-07-15
Applicant: BOC GROUP INC
Inventor： SMITH P A JOEL
Abstract: An electron-beam heated vapor source for operation in vacuum is disclosed. The source comprises a magnet and a pair of parallel pole plates for deflecting the beam from an electron-beam gun through an angle of approximately 270 DEG into a crucible containing material to be vaporized by evaporation, sublimation or other process. A pole rod extends from each of the pole plates into the space between them. A means is provided for precisely adjusting the distance separating the pole rods while the vapor source is in vacuum. This adjustment enables the impact area of the beam, and thus, the deposition rate or other impact area related parameter to be optimized while the vapor source is in operation. Preferably, each pole rod extends through a clearance hole in the pole plate and the adjustment means comprises a rack integral with the rod and a pinion which can be driven by a control means located outside the vacuum chamber.
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公开(公告)号：DE69810704D1
公开(公告)日：2003-02-20
申请号：DE69810704
申请日：1998-06-19
Applicant: BOC GROUP INC
Inventor： HILL RUSSEL J , SMITH P A JOEL , CHANG PING
Abstract: An electron-beam evaporation system (30) comprising an ingot rod (34), the ingot rod having a bottom end (34c), a tip end (34a) and a side (34b); an electron-beam evaporation source (40) for evaporating the ingot rod; and a rotation mechanism (36) connected to the bottom end of the ingot rod adapted to rotate the ingot rod while the electron-beam evaporation source acts on the tip of the ingot rod, wherein the ingot rod is free-standing so that the ingot rod does not contact a cooling crucible (38) at the side of the ingot rod near the tip of the ingot rod.
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