HIGH-TEMPERATURE, SPIN-ON, BONDING COMPOSITIONS FOR TEMPORARY WAFER BONDING USING SLIDING APPROACH

    公开(公告)号:SG175589A1

    公开(公告)日:2011-11-28

    申请号:SG2011072709

    申请日:2007-09-21

    Abstract: New compositions and methods of using those compositions as bonding compositions are provided. The compositions comprise a polymer dispersed or dissolved in a solvent system, and can be used to bond an active wafer to a earner wafer or substrate to assist in protecting the active wafer and its active sites during subsequent processing and handling. The compositions form bonding layers that are chemically and thermally resistant, but that can also be softened to allow the wafers to slide apart at the appropriate stage in the fabrication process.FIGURE 1

    HIGH-TEMPERATURE SPIN-ON TEMPORARY BONDING COMPOSITIONS
    2.
    发明申请
    HIGH-TEMPERATURE SPIN-ON TEMPORARY BONDING COMPOSITIONS 审中-公开
    高温旋转临时粘结组合物

    公开(公告)号:WO2009003029A3

    公开(公告)日:2009-04-30

    申请号:PCT/US2008068170

    申请日:2008-06-25

    Abstract: New compositions and methods of using those compositions as bonding compositions are provided. The compositions are preferably thermoplastic and comprise imides, amideimides, and/or amideimide-siloxanes (either in polymeric or oligomeric form) dispersed or dissolved in a solvent system, and can be used to bond an active wafer to a carrier wafer or substrate to assist in protecting the active wafer and its active sites during subsequent processing and handling. The compositions form bonding layers that are chemically and thermally resistant, but that can also be softened to allow the wafers to slide apart at the appropriate stage in the fabrication process.

    Abstract translation: 提供了使用这些组合物作为粘合组合物的新组合物和方法。 组合物优选是热塑性的,并且包括分散或溶解在溶剂体系中的酰亚胺,酰胺酰亚胺和/或酰胺酰亚胺 - 硅氧烷(以聚合或低聚形式),并且可用于将活性晶片结合到载体晶片或基底以辅助 在后续处理和处理期间保护活性晶片及其活性位点。 组合物形成化学和耐热的粘合层,但是也可以软化以使晶片在制造过程中的适当阶段分开。

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