公开(公告)号：AT157465T

公开(公告)日：1997-09-15

申请号：AT88901669

申请日：1988-01-12

Applicant: BREWER SCIENCE INC

Inventor： BREWER TERRY L ,  HAWLEY DAN W ,  LAMB JAMES E ,  LATHAM WILLIAM J ,  STICHNOTE LYNN K

IPC: G02B5/20 ,  G03F7/00 ,  G09F9/00 ,  G09F9/30 ,  H01L31/0216 ,  G03F9/00 ,  G03C5/00

Abstract: Filters (10, 15) suitable for microelectronic uses and the like may be prepared directly on substrates (250) either as monolithically integrated filters (10) or as hybrid filters (50) using a soluble dye material in a resin (252). The resin (252) may be applied to microelectronic substrates (250) and patterned by conventional microphotolitho-graphic processes.

公开(公告)号：EP0298116A4

公开(公告)日：1990-06-26

申请号：EP88901669

申请日：1988-01-12

Applicant: BREWER SCIENCE INC

Inventor： BREWER TERRY L ,  HAWLEY DAN W ,  LAMB JAMES E ,  LATHAM WILLIAM J ,  STICHNOTE LYNN K

IPC: G02B5/20 ,  G03F7/00 ,  G09F9/00 ,  G09F9/30 ,  H01L31/0216 ,  G03F9/00 ,  G03C5/00

CPC classification number: G03F7/0007 ,  H01L31/02162

Abstract: Filters (10, 15) suitable for microelectronic uses and the like may be prepared directly on substrates (250) either as monolithically integrated filters (10) or as hybrid filters (50) using a soluble dye material in a resin (252). The resin (252) may be applied to microelectronic substrates (250) and patterned by conventional microphotolitho-graphic processes.