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公开(公告)号：JPS6378540A
公开(公告)日：1988-04-08
申请号：JP22322087
申请日：1987-09-08
Applicant: BREWER SCIENCE INC
Inventor： TERII BURIYUUWAA , TONII DEII FURAIMU , MARII JII MOSU
IPC: H01L21/312 , G03C1/74 , G03F7/075 , H01L21/027
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公开(公告)号：JPS6377123A
公开(公告)日：1988-04-07
申请号：JP22321987
申请日：1987-09-08
Applicant: BREWER SCIENCE INC
Inventor： TERII BURIYUUWAA , TONII DEII FURAIMU , MARII JII MOSU
IPC: H01L21/312 , G03C1/74 , G03F7/075 , H01L21/027
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